Advanced film transfer system for STP method in planarization technology

Advanced Metallization Conference (AMC)

Volumn , Issue , 2000, Pages 535-540

  Sato, Norio ^a   Machida, Katsuyuki ^a   Kudo, Kazuhisa ^a   Yano, Masaki ^a   Kyuragi, Hakaru ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; HOT PRESSING; PERMITTIVITY; SILICON WAFERS; SPIN COATING;

FILM TRANSFER SYSTEMS;

DIELECTRIC FILMS;

EID: 0034461180     PISSN: 10480854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)