Porosity characterization of mesoporous dielectric thin films using positron annihilation spectroscopy

Advanced Metallization Conference (AMC)

Volumn , Issue , 2000, Pages 571-577

  Petkov, Mihail P ^a   Weber, Marc H ^a   Lynn, Kelvin G ^a   Rodbell, Kenneth P ^a   Volksen, Willi ^a   Miller, Robert D ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; MESOPOROUS MATERIALS; NONDESTRUCTIVE EXAMINATION; PERMITTIVITY; PORE SIZE; POROSITY; POSITRON ANNIHILATION SPECTROSCOPY;

DIELECTRIC THIN FILMS;

THIN FILMS;

EID: 0034460139     PISSN: 10480854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

1. Studies of MSSQ resin
2. Theoretical model for o-Ps lifetime - Pore size calibration