Precursor design for Liquid Injection CVD of lead scandium tantalate thin films

Integrated Ferroelectrics

Volumn 30, Issue 1-4, 2000, Pages 19-26

  Jones, Anthony C ^a   Davies, Hywel O ^a   Leedham, Timothy J ^a   Wright, Peter J ^b   Lane, Penelope A ^b   Crosbie, Michael J ^b   Williams, Dennis J ^b   Jones, Jason C ^b   Reeves, Christopher L ^b  

^a Inorgtech Limited   (United Kingdom)

^b DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

Lead scandium tantalate; MOCVD; Precursors; Pyroelectric oxide

Indexed keywords

CRYSTAL ORIENTATION; FILM GROWTH; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDES; PEROVSKITE; PHASE COMPOSITION; PYROELECTRICITY; TEMPERATURE; THERMODYNAMIC PROPERTIES;

CHEMICAL PROPERTIES; LEAD SCANDIUM TANTALATE; PRECURSOR DESIGN; PYROELECTRIC OXIDE;

FERROELECTRIC THIN FILMS;

EID: 0034446331     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580008222249     Document Type: Conference Paper

References (9)