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Materials Research Society Symposium - Proceedings

Volumn 617, Issue , 2000, Pages

Ablation-induced stresses in fused silica by 157-nm F2-laser irradiation

(2) Konovalov, I A a Herman, P R a

a UNIVERSITY OF TORONTO (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INTERFEROMETERS; LASER ABLATION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; OPTICAL MICROSCOPY; STRAIN RATE; SUBSTRATES; TENSILE STRESS; THIN FILMS;

OPTICAL INTERFEROMETRIC MICROSCOPES;

FUSED SILICA;

EID: 0034439794 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-617-j3.3 Document Type: Conference Paper

Times cited : (10)

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