Excimer laser crystallisation of poly-Si TFTs for AMLCDs

Materials Research Society Symposium - Proceedings

Volumn 621, Issue , 2000, Pages

  Brotherton, S D ^a   McCulloch, D J ^a   Gowers, J P ^a   Ayres, J R ^a   Fisher, C A ^a   Rohlfing, F W ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; EXCIMER LASERS; ION IMPLANTATION; MOSFET DEVICES; POLYSILICON;

EXCIMER LASER CRYSTALLISATION;

THIN FILM TRANSISTORS;

EID: 0034431281     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-621-q7.1.1     Document Type: Conference Paper

References (11)