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Volumn 622, Issue , 2000, Pages T121-T1211
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Investigations of non-micropipe x-ray imaged crystal defects in sic devices
a a b b b a c |
Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COMPUTER SIMULATION;
CRYSTAL DEFECTS;
ELECTRIC PROPERTIES;
EPITAXIAL GROWTH;
OPTICAL MICROSCOPY;
SILICON CARBIDE;
X RAY ANALYSIS;
MICROPLASMA POWER;
SEMICONDUCTOR DEVICES;
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EID: 0034431187
PISSN: 02729172
EISSN: None
Source Type: Journal
DOI: 10.1557/proc-622-t1.2.1 Document Type: Article |
Times cited : (8)
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References (15)
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