Structure and property characterization of porous low-k dielectric constant thin films using X-ray reflectivity and small angle neutron scattering

Materials Research Society Symposium-Proceedings

Volumn 612, Issue , 2000, Pages D411-D418

  Lin, Eric K ^a   Wu, Wen Li ^a   Jin, Changming ^b   Wetzel, Jeffrey T ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MOISTURE DETERMINATION; NEUTRON SCATTERING; OPTICAL RESOLVING POWER; PORE SIZE; POROSITY; THERMAL EXPANSION; THIN FILMS;

X-RAY REFLECTIVITY;

DIELECTRIC FILMS;

EID: 0034431072     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/proc-612-d4.1.1     Document Type: Article

References (10)