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Materials Research Society Symposium-Proceedings

Volumn 612, Issue , 2000, Pages D5261-D5266

Sol-gel derived silica layers for low-k dielectrics applications

(6) Acosta, Sylvie a Ayral, André a Guizard, Christian a Lecornec, Charles b Moussavi, Mehdi b Passemard, Gérard c

a UNIVERSITÉ DE MONTPELLIER (France)

b CEA LETI (France)

c CEA GRENOBLE (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; PERMITTIVITY; POROSITY; POROUS SILICON; SOL-GELS; SPIN COATING; SYNTHESIS (CHEMICAL); TOXICITY;

SUPERCRITICAL DRYING;

SILICA;

EID: 0034431054 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: 10.1557/proc-612-d5.26.1 Document Type: Article

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.