Electric and morphology studies of ohmic contacts on AlGaN/GaN

Materials Research Society Symposium - Proceedings

Volumn 622, Issue , 2000, Pages

  Tilak, V ^a   Dimitrov, R ^a   Murphy, M ^a   Green, B ^a   Smart, J ^a   Schaff, W J ^a   Shealy, J R ^a   Eastman, L F ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC RESISTANCE; MORPHOLOGY; OHMIC CONTACTS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR DOPING; THERMAL EFFECTS;

TRANSFER RESISTANCE;

GALLIUM NITRIDE;

EID: 0034428219     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-622-t7.4.1     Document Type: Conference Paper

References (9)