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Volumn , Issue , 2000, Pages 13-18
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Optical constants of GaAs from 0.73 to 6.60 eV for dielectric film thickness metrology in compound semiconductor manufacturing
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
DIELECTRIC FILMS;
ELLIPSOMETRY;
ENERGY GAP;
LIGHT ABSORPTION;
LIGHT TRANSMISSION;
MAGNESIUM COMPOUNDS;
OXIDATION;
PRISMS;
REFRACTIVE INDEX;
SURFACE ROUGHNESS;
THICKNESS MEASUREMENT;
DIELECTRIC FILM THICKNESS METROLOGY;
GALLIUM ARSENIDE;
MAGNESIUM FLUORIDE BEREK WAVEPLATE COMPENSATOR;
OPTICAL CONSTANT;
SPECTROSCOPIC ELLIPSOMETRY;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0034424891
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (5)
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References (12)
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