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Brazilian Journal of Physics

Volumn 30, Issue 3, 2000, Pages 527-532

Hardness and stress of amorphous carbon films deposited by glow discharge and ion beam assisting deposition

(2) Marques, F C a Lacerda, R G a

a UNIVERSITY OF CAMPINAS (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034368204 PISSN: 01039733 EISSN: None Source Type: Journal
DOI: 10.1590/S0103-97332000000300008 Document Type: Article

Times cited : (9)

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