Design consideration of self-aligned recessed channel (RC) devices in sub-100 nm CMOS technology

Journal of the Korean Physical Society

Volumn 37, Issue 5 Part 1, 2000, Pages 617-623

  Chung, Doo Yeon ^a   Lee, Jong Ho ^a  

^a Wonkwang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034343847     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.37.617     Document Type: Article

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