Carrier distribution profiles in Si-doped layers in GaAs formed by focused ion beam implantation and successive overlayer growth

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3158-3161

  Hada, Takuo ^a   Goto, Takayuki ^a   Yanagisawa, Junichi ^a   Wakaya, Fujio ^a   Yuba, Yoshihiko ^a   Gamo, Kenji ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITANCE; ELECTRIC POTENTIAL; MOLECULAR BEAM EPITAXY; POISSON DISTRIBUTION; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH;

CARRIER DISTRIBUTION PROFILES;

SEMICONDUCTING FILMS;

EID: 0034317712     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1319683     Document Type: Article

References (11)

1. E. F. Schubert, J. B. Stark, B. Ullrich, and J. E. Cunningham. Appl. Phys. Lett. 52, 1508 (1988).
2. E. F. Schubert, T. D. Harris, J. E. Cunningham, and W. Jan, Phys. Rev. B 39, 11011 (1989).
3. E. F. Schubert, R. F. Kopf, J. M. Kuo, H. S. Luftman, and P. A. Garbinski, Appl. Phys. Lett. 57, 497 (1990).
4. A. Takamori, E. Miyauchi, H. Arimoto, Y. Bamba, and H. Hashimoto, Jpn. J. Appl. Phys., Part 2 23, L599 (1984).
5. J. H. Thompson et al. Surf. Sci. 267, 69 (1992).
6. J. Yanagisawa, H. Nakayama, F. Wakaya, Y. Yuba, and K. Gamo, J. Vac. Sci. Technol. B 14, 3938 (1996).
7. J. Yanagisawa, T. Goto, T. Hada, M. Nakai, F. Wakaya, Y. Yuba, and K. Gamo, J. Vac. Sci. Technol. B 17, 3072 (1999).
8. J. Yanagisawa, H. Nakayama, K. Oka, M. Nakai, F. Wakaya, Y. Yuba, S. Takaoka, K. Murase, and K. Gamo, J. Vac. Sci. Technol. B 15, 2930 (1997).
9. T. Goto, T. Hada, J. Yanagisawa, F. Wakaya, Y. Yuba, and K. Gamo, Appl. Surf. Sci. 159/160, 277 (2000).
10. J. F. Zieglar, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
11. I.-H. Tan, G. L. Snider, L. D. Chang, and E. L. Hu, J. Appl. Phys. 68, 4071 (1990); Computer program was taken from the World Wide Web at http://www.nd.edu/~gsnider/