Characterization of showerhead performance at low pressure

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 2808-2813

  Hash, D B ^a   Mihopoulos, T ^b   Govindan, T R ^a   Meyyappan, M ^a  

^a NASA AMES RESEARCH CENTER   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; FRICTION; MONTE CARLO METHODS; PRESSURE DROP; REYNOLDS NUMBER;

KNUDSEN NUMBER; SHOWERHEADS; SUPERFICIAL VELOCITY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034316530     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1322048     Document Type: Article

References (15)

1. A. Dollet, J. P. Couderc, and B. Despax, Plasma Sources Sci. Technol. 4, 94 (1995).
2. S.-K. Park and D. J. Economou, J. Electrochem. Soc. 138, 1499 (1991).
3. H. Caquineau, G. Dupont, B. Despax, and J. P. Couderc. J. Vac. Sci. Technol. A 14, 2071 (1996).
4. G. J. Nienhuis and W. Goedheer, Plasma Sources Sci. Technol. 8, 295 (1999).
5. S.-K. Park and D. J. Economou, J. Electrochem. Soc. 137, 2624 (1990).
6. H. Caquineau and B. Despax, Chem. Eng. Sci. 52, 2901 (1997).
7. L. Sansonnens, A. A. Howling, and Ch. Hollenstein, Plasma Sources Sci. Technol. 9, 205 (2000).
8. L. A. Gochberg and D. F. G. Rault, in Rarefied Gas Dynamics 20, edited by C. Shen (Peking University Press, Beijing, 1997).
9. G. A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Clarendon, Oxford, 1994).
10. S. Dietrich and I. D. Boyd, J. Comput. Phys. 126, 328 (1996).
11. F. M. White, Viscous Fluid Flow, 2nd ed. (McGraw-Hill, New York, 1991), p. 291.
12. A. H. Shapiro, The Dynamics and Thermodynamics of Compressible Fluid Flow (Wiley, New York, 1953), Vol. I, p. 184.
13. M. Knudsen, Ann. Phys. (Leipzig) 28, 75 (1909); 35, 389 (1911).
14. M. Knudsen, Ann. Phys. (Leipzig) 28, 75 (1909); 35, 389 (1911).
15. S. Dushman, Scientific Foundations of Vacuum Technique, 2nd ed. (Wiley, New York, 1962), p. 106.