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Volumn 28, Issue 5-6, 2000, Pages 363-368
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Material requirements and design considerations for Si/SiGe heterojunction CMOS
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER AIDED DESIGN;
COMPUTER SIMULATION;
DEGRADATION;
HETEROJUNCTIONS;
HIGH TEMPERATURE EFFECTS;
MOSFET DEVICES;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR DEVICE MODELS;
STRAIN;
MATERIAL DEGRADATION;
STRAIN RELAXATION;
CMOS INTEGRATED CIRCUITS;
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EID: 0034316393
PISSN: 07496036
EISSN: None
Source Type: Journal
DOI: 10.1006/spmi.2000.0935 Document Type: Article |
Times cited : (6)
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References (8)
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