메뉴 건너뛰기




Volumn 43, Issue 6, 1996, Pages 911-918

Deep submicron CMOS based on silicon germanium technology

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON TRANSPORT PROPERTIES; HETEROJUNCTION BIPOLAR TRANSISTORS; MOSFET DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA;

EID: 0030172689     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.502123     Document Type: Article
Times cited : (79)

References (39)
  • 4
    • 0026868531 scopus 로고
    • 89 GHz / room temperature silicon MOSFETs
    • R. Yan et al., 89 GHz /( room temperature silicon MOSFETs, IEEE Electron Device Lett., vol. 13, pp. 256-258, 1992.
    • (1992) IEEE Electron Device Lett. , vol.13 , pp. 256-258
    • Yan, R.1
  • 8
    • 0028602571 scopus 로고
    • Channel and source/drain engineering in high performance sub-0.1 ;im nMOSFET's using x-ray lithography
    • H. Hu. L. T. Su, Y. Yang, D. A. Antoniadis, and H. Smith, Channel and source/drain engineering in high performance sub-0.1 ;im nMOSFET's using x-ray lithography, in Symp. VLSI Tech. Dig., 1994, pp. 17-18.
    • (1994) Symp. VLSI Tech. Dig. , pp. 17-18
    • Hu, H.1    Su, L.T.2    Yang, Y.3    Antoniadis, D.A.4    Smith, H.5
  • 9
    • 0029289875 scopus 로고    scopus 로고
    • A study of deep-submicron MOSFET scaling based on experiment and simulation
    • to he published
    • H. Hu. J. Jacobs, L. Su, and D. Antoniadis, A study of deep-submicron MOSFET scaling based on experiment and simulation, IEEE Traits. Electron Devices, to he published.
    • IEEE Traits. Electron Devices
    • Hu, H.1    Jacobs, J.2    Su, L.3    Antoniadis, D.4
  • 10
    • 84864384696 scopus 로고
    • Physics and applications of GeSi/Si strained layer helerostructures, 1EEE
    • R. People, Physics and applications of GeSi/Si strained layer helerostructures, 1EEEJ. Quantum Electron., vol. QE-21, pp. 1696-1710. 1986.
    • (1986) J. Quantum Electron. , vol.21 QE , pp. 1696-1710
    • People, R.1
  • 11
    • 0011411061 scopus 로고
    • High mobility p-channel metal-oxide-semiconductor field-effect-transistor on strained Si
    • D. K. Nayak, J. Woo, J. S. Park, K. L. Wang, and K. Mac Williams, High mobility p-channel metal-oxide-semiconductor field-effect-transistor on strained Si, Appl. Phys. Lett., vol. 62, pp. 2853-2855. 1993.
    • (1993) Appl. Phys. Lett. , vol.62 , pp. 2853-2855
    • Nayak, D.K.1    Woo, J.2    Park, J.S.3    Wang, K.L.4    Mac Williams, K.5
  • 13
    • 0022720216 scopus 로고
    • Enhancement and depletion mode pchanncl GcSi/Si modulation doped FET's
    • T. P. Pearsall and J. C. Bean, Enhancement and depletion mode pchanncl GcSi/Si modulation doped FET's, IEEE Electron Device Lett., vol. EDL-7, pp. 308-310, 1986.
    • (1986) IEEE Electron Device Lett. , vol.7 EDL , pp. 308-310
    • Pearsall, T.P.1    Bean, J.C.2
  • 14
    • 28644437838 scopus 로고
    • Silicon-based semiconductor heteroslructures: Column IV bandgap engineering
    • J. C. Bean, Silicon-based semiconductor heteroslructures: Column IV bandgap engineering, Proc. IEEE, vol. 80, 1992, pp. 571-587.
    • (1992) Proc. IEEE , vol.80 , pp. 571-587
    • Bean, J.C.1
  • 15
    • 0028404792 scopus 로고
    • Growth of 100GHz SiGe-hctcrojunction bipolar transistor (HBT) structures
    • E. Kasper, H. Kibbel, H. Herzog, and A. Gruhle, Growth of 100GHz SiGe-hctcrojunction bipolar transistor (HBT) structures, J. Appl. Phys. pi. 1. vol. 33, pp. 2415-2418. 1994.
    • (1994) J. Appl. Phys. Pi. 1. , vol.33 , pp. 2415-2418
    • Kasper, E.1    Kibbel, H.2    Herzog, H.3    Gruhle, A.4
  • 17
    • 0027577698 scopus 로고
    • P-type Ge-channel MODFET's with high transconductancc grown on Si substrates
    • U. Konig and F. Schaffler, p-type Ge-channel MODFET's with high transconductancc grown on Si substrates, IEEE Electron Device Lett., vol. 14. pp. 205-207, 1993.
    • (1993) IEEE Electron Device Lett. , vol.14 , pp. 205-207
    • Konig, U.1    Schaffler, F.2
  • 20
    • 28444459024 scopus 로고
    • Mechanism and conditions for anomalous strain relaxation in graded thin films and superlattices
    • F. K. LeGoues, B. S. Meyerson, J. F. Morar, and P. D. Kirchner, Mechanism and conditions for anomalous strain relaxation in graded thin films and superlattices. J. Appl. Phys., vol. 71, pp. 4230-4243, 1992.
    • (1992) J. Appl. Phys. , vol.71 , pp. 4230-4243
    • Legoues, F.K.1    Meyerson, B.S.2    Morar, J.F.3    Kirchner, P.D.4
  • 22
    • 0001325698 scopus 로고
    • New approach to the growth of iow dislocation relaxed SiGe material
    • A. Powell, F. K. LeGoues, and S. S. lyer, New approach to the growth of iow dislocation relaxed SiGe material, Appl Phvs. Lett., vol. 64, pp. 324-326, 1994.
    • (1994) Appl Phvs. Lett. , vol.64 , pp. 324-326
    • Powell, A.1    Legoues, F.K.2    Lyer, S.S.3
  • 23
    • 0018683243 scopus 로고
    • Characterization of the electron mobility in the inverted (100) Si surface
    • A. G. Sabnis and J. T. Clemens, Characterization of the electron mobility in the inverted (100) Si surface, lEDMTech. Dig., pp. 18-21, 1979.
    • (1979) LEDMTech. Dig. , pp. 18-21
    • Sabnis, A.G.1    Clemens, J.T.2
  • 24
    • 33747026453 scopus 로고    scopus 로고
    • K. Ismail, private communication
    • K. Ismail, private communication.
  • 27
    • 33746991507 scopus 로고
    • UHV/CVD growth of Si and Si : Ge alloys: Chemistry, physics and device applications
    • B. S. Meyerson, UHV/CVD growth of Si and Si : Ge alloys: Chemistry, physics and device applications, Proc. IEEE. vol. 80, pp. 1592-1608, 1992.
    • (1992) Proc. IEEE. , vol.80 , pp. 1592-1608
    • Meyerson, B.S.1
  • 29
    • 0027640789 scopus 로고
    • Silicon MOS transconductance scaling into the overshoot regime
    • M. Pinto, E. Sangiori, and J. Bude, Silicon MOS transconductance scaling into the overshoot regime, IEEE Electron Device Lett, vol. 14, pp. 375-378. 1993.
    • (1993) IEEE Electron Device Lett , vol.14 , pp. 375-378
    • Pinto, M.1    Sangiori, E.2    Bude, J.3
  • 30
    • 33747001056 scopus 로고
    • Technology Modeling Associates, Inc.
    • TMA MEDICI Version 2.0, Technology Modeling Associates, Inc., 1994.
    • (1994) TMA MEDICI Version 2.0
  • 32
    • 0009509593 scopus 로고
    • Carrier mobilities in silicon empirically related to doping and field
    • D. M. Caughey and R. E. Thomas. Carrier mobilities in silicon empirically related to doping and field, Proc. IEEE, vol. 55, pp. 2192-2193, 1967.
    • (1967) Proc. IEEE , vol.55 , pp. 2192-2193
    • Caughey, D.M.1    Thomas, R.E.2
  • 33
    • 0020763683 scopus 로고
    • A mobility model for carriers in the MOS inversion layer
    • K. Yamaguchi, A mobility model for carriers in the MOS inversion layer, IEEE Trans, Electron Devices, vol. ED-30, pp. 658-663, 1983.
    • (1983) IEEE Trans, Electron Devices , vol.30 ED , pp. 658-663
    • Yamaguchi, K.1
  • 34
    • 2542429019 scopus 로고
    • Ultra-high-speed modulation-doped field-effect-transistors: A tutorial review
    • L. D. Nguyen, L. E. Larson, and U. K. Mishra, Ultra-high-speed modulation-doped field-effect-transistors: A tutorial review, Proc. IEEE. vol. 80, pp. 494-518, 1992.
    • (1992) Proc. IEEE. , vol.80 , pp. 494-518
    • Nguyen, L.D.1    Larson, L.E.2    Mishra, U.K.3
  • 35
    • 0024048459 scopus 로고
    • The role of inefficient charge modulation in limiting the current-gain cutoff frequency of the MODFET
    • [34[ M. C. Foisy, P. J. Tasker, B. Hughes, and L. F. Eastman, The role of inefficient charge modulation in limiting the current-gain cutoff frequency of the MODFET, IEEE Trans. Electron Devices, vol. 35, pp. 871-877, 1988.
    • (1988) IEEE Trans. Electron Devices , vol.35 , pp. 871-877
    • Foisy, M.C.1    Tasker, P.J.2    Hughes, B.3    Eastman, L.F.4
  • 36
    • 0026735256 scopus 로고
    • An improved energy transport model including nonparabolicity and non-Maxwellian distribution effects
    • D. Chen. E. Ran, U. Ravaioli, C.-W. Shu, and R. W. Button, An improved energy transport model including nonparabolicity and non-Maxwellian distribution effects, IEEE Electron Device Lett., vol. 13, pp. 26-28, 1992.
    • (1992) IEEE Electron Device Lett. , vol.13 , pp. 26-28
    • Chen, D.1    Ran, E.2    Ravaioli, U.3    Shu, C.-W.4    Button, R.W.5
  • 37
    • 0027245290 scopus 로고
    • Silicon MOSFET's, the microwave device technology for the 90s
    • N. Camilleri, J. Costa, D. Lovelace, and D. Ngo, Silicon MOSFET's, the microwave device technology for the 90s, in Proc. IEEE MTT-S, 1993, pp. 545-548.
    • (1993) Proc. IEEE MTT-S , pp. 545-548
    • Camilleri, N.1    Costa, J.2    Lovelace, D.3    Ngo, D.4
  • 39


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.