-
1
-
-
0028192803
-
Kxperimental high performance sub-0.1 -4/m channel nMOSFET's
-
Y. Mii, S. Rishmn, Y. Taur, D. Kern, T. I.ii, K. I,ee, K. A. .lenkins, D. Quinlan, T. Brown, D. Danner, F. Sewell, and M. Polcari, Kxperimental high performance sub-0.1 -4/m channel nMOSFET's, IEEE Electron Device Lett., vol. 15. pp. 28-30, 1994.
-
(1994)
IEEE Electron Device Lett.
, vol.15
, pp. 28-30
-
-
Mii, Y.1
Rishmn, S.2
Taur, Y.3
Kern, D.4
Iii, T.5
Lenkins, K.A.6
Quinlan, D.7
Brown, T.8
Danner, D.9
Sewell, F.10
Polcari, M.11
-
2
-
-
0027879328
-
High performance 0.1 /urn CMOS devices with 1.5 V power supply
-
Y. Taur, S. Wind, Y. Mii. Y. Lu, D. Moy. K. Jenkins, C. Clien. P. Coane, D. Klaus, J. Bucchignano, M. Rosenfield, M. Thomson, and M. Polcari, High performance 0.1 /urn CMOS devices with 1.5 V power supply, IEDM Tech. Dig., pp. 127-130, 1993.
-
(1993)
IEDM Tech. Dig.
, pp. 127-130
-
-
Taur, Y.1
Wind, S.2
Mii Y Lu, Y.3
Moy K Jenkins, D.4
Clien P Coane, C.5
Klaus, D.6
Bucchignano, J.7
Rosenfield, M.8
Thomson, M.9
Polcari, M.10
-
3
-
-
33747251411
-
Ultra-deep submicron Si MOSFET with /, exceeding 100 GHz
-
R. Yan, K. Lee, Y. Kirn, D. Jeon, D. Tennant, and E. Westerwick, Ultra-deep submicron Si MOSFET with /, exceeding 100 GHz, in Proc. Ultrafasî Electron, and Oplo-Electnmics, (Opt. Soc. Am.) vol. 14, 1993, pp. 60-62;
-
(1993)
Proc. Ultrafasî Electron, and Oplo-Electnmics, (Opt. Soc. Am.)
, vol.14
, pp. 60-62
-
-
Yan, R.1
Lee K2
Kirn, Y.3
Jeon, D.4
Tennant, D.5
Westerwick, E.6
-
4
-
-
0026868531
-
89 GHz / room temperature silicon MOSFETs
-
R. Yan et al., 89 GHz /( room temperature silicon MOSFETs, IEEE Electron Device Lett., vol. 13, pp. 256-258, 1992.
-
(1992)
IEEE Electron Device Lett.
, vol.13
, pp. 256-258
-
-
Yan, R.1
-
5
-
-
85067384871
-
0.1 -4m p-channel MOSFET's wilh 51 GHz /t
-
K. Lee, R. Yan, D. Jeon, Y. Kirn, D. Tennant, E. Westerwick, K. Early, G. Chin, M. Morris, R. Johnson, T. Liu, R. Kistler, A. Voshchenkov, R. Swartz, and A. Oumazd, 0.1 -4m p-channel MOSFET's wilh 51 GHz /t. IEDM Tech. Dig., pp. 1012-1014, 1992.
-
(1992)
IEDM Tech. Dig.
, pp. 1012-1014
-
-
Lee K1
Yan, R.2
Jeon, D.3
Kirn, Y.4
Tennant, D.5
Westerwick, E.6
Early, K.7
Chin, G.8
Morris, M.9
Johnson, R.10
Liu, T.11
Kistler, R.12
Voshchenkov, A.13
Swartz, R.14
Oumazd, A.15
-
6
-
-
0039956433
-
Generalized guide for MOSFET miniaturization
-
[5J J. R. Brews, W. Fichtner, F. H. Nicollian, and S. M. Sze, Generalized guide for MOSFET miniaturization, IEEE Electron Device Lett., vol. EDL-1, pp. 2-5, 1980.
-
(1980)
IEEE Electron Device Lett.
, vol.1 EDL
, pp. 2-5
-
-
Brews, J.J.R.1
Fichtner, W.2
Nicollian, F.H.3
Sze, S.M.4
-
7
-
-
0027684546
-
An improved generalized guide for MOSFET scaling
-
K. K. Ng, S. A. Eshraghi, and T. D. Stanik, An improved generalized guide for MOSFET scaling, IEEE Trans. Electron Devices, vol. 40, pp. 1895-1897, 1993.
-
(1993)
IEEE Trans. Electron Devices
, vol.40
, pp. 1895-1897
-
-
Ng, K.K.1
Eshraghi, S.A.2
Stanik, T.D.3
-
8
-
-
0028602571
-
Channel and source/drain engineering in high performance sub-0.1 ;im nMOSFET's using x-ray lithography
-
H. Hu. L. T. Su, Y. Yang, D. A. Antoniadis, and H. Smith, Channel and source/drain engineering in high performance sub-0.1 ;im nMOSFET's using x-ray lithography, in Symp. VLSI Tech. Dig., 1994, pp. 17-18.
-
(1994)
Symp. VLSI Tech. Dig.
, pp. 17-18
-
-
Hu, H.1
Su, L.T.2
Yang, Y.3
Antoniadis, D.A.4
Smith, H.5
-
9
-
-
0029289875
-
A study of deep-submicron MOSFET scaling based on experiment and simulation
-
to he published
-
H. Hu. J. Jacobs, L. Su, and D. Antoniadis, A study of deep-submicron MOSFET scaling based on experiment and simulation, IEEE Traits. Electron Devices, to he published.
-
IEEE Traits. Electron Devices
-
-
Hu, H.1
Jacobs, J.2
Su, L.3
Antoniadis, D.4
-
10
-
-
84864384696
-
Physics and applications of GeSi/Si strained layer helerostructures, 1EEE
-
R. People, Physics and applications of GeSi/Si strained layer helerostructures, 1EEEJ. Quantum Electron., vol. QE-21, pp. 1696-1710. 1986.
-
(1986)
J. Quantum Electron.
, vol.21 QE
, pp. 1696-1710
-
-
People, R.1
-
11
-
-
0011411061
-
High mobility p-channel metal-oxide-semiconductor field-effect-transistor on strained Si
-
D. K. Nayak, J. Woo, J. S. Park, K. L. Wang, and K. Mac Williams, High mobility p-channel metal-oxide-semiconductor field-effect-transistor on strained Si, Appl. Phys. Lett., vol. 62, pp. 2853-2855. 1993.
-
(1993)
Appl. Phys. Lett.
, vol.62
, pp. 2853-2855
-
-
Nayak, D.K.1
Woo, J.2
Park, J.S.3
Wang, K.L.4
Mac Williams, K.5
-
12
-
-
0022687784
-
The n-channel SiGe/Si modulation doped field effect transistor
-
H. Daembkes, H. J. Herzog, H, Jorke, H. Kibbel, and E. Kasper. The n-channel SiGe/Si modulation doped field effect transistor, IEEE Trans. Electron Devices, vol. ED-33, pp. 633-637, 1986.
-
(1986)
IEEE Trans. Electron Devices
, vol.33 ED
, pp. 633-637
-
-
Daembkes, H.1
Herzog, H.J.2
Jorke3
Kibbel, H.4
Kasper, E.5
-
13
-
-
0022720216
-
Enhancement and depletion mode pchanncl GcSi/Si modulation doped FET's
-
T. P. Pearsall and J. C. Bean, Enhancement and depletion mode pchanncl GcSi/Si modulation doped FET's, IEEE Electron Device Lett., vol. EDL-7, pp. 308-310, 1986.
-
(1986)
IEEE Electron Device Lett.
, vol.7 EDL
, pp. 308-310
-
-
Pearsall, T.P.1
Bean, J.C.2
-
14
-
-
28644437838
-
Silicon-based semiconductor heteroslructures: Column IV bandgap engineering
-
J. C. Bean, Silicon-based semiconductor heteroslructures: Column IV bandgap engineering, Proc. IEEE, vol. 80, 1992, pp. 571-587.
-
(1992)
Proc. IEEE
, vol.80
, pp. 571-587
-
-
Bean, J.C.1
-
15
-
-
0028404792
-
Growth of 100GHz SiGe-hctcrojunction bipolar transistor (HBT) structures
-
E. Kasper, H. Kibbel, H. Herzog, and A. Gruhle, Growth of 100GHz SiGe-hctcrojunction bipolar transistor (HBT) structures, J. Appl. Phys. pi. 1. vol. 33, pp. 2415-2418. 1994.
-
(1994)
J. Appl. Phys. Pi. 1.
, vol.33
, pp. 2415-2418
-
-
Kasper, E.1
Kibbel, H.2
Herzog, H.3
Gruhle, A.4
-
16
-
-
0027629428
-
High performance Si/SiGe n-type modulation doped transistors
-
K. Ismail, S. Rishton, J. 0. Chu, K. Chan, and B. 3. Meyerson, High performance Si/SiGe n-type modulation doped transistors, IEEE Electron Device Lett., vol. 14, pp. 348-350, 1993.
-
(1993)
IEEE Electron Device Lett.
, vol.14
, pp. 348-350
-
-
Ismail, K.1
Rishton, S.2
Chu, J.3
Chan, K.4
Meyerson, B.5
-
17
-
-
0027577698
-
P-type Ge-channel MODFET's with high transconductancc grown on Si substrates
-
U. Konig and F. Schaffler, p-type Ge-channel MODFET's with high transconductancc grown on Si substrates, IEEE Electron Device Lett., vol. 14. pp. 205-207, 1993.
-
(1993)
IEEE Electron Device Lett.
, vol.14
, pp. 205-207
-
-
Konig, U.1
Schaffler, F.2
-
18
-
-
84944375335
-
SiGe-channel heterojunction p-MOSFET's
-
[171 S. Verdonckt-Vandebroek. E. F. Crabbe, B. S. Meyerson, D. L. Haraine, P. J. Restle, J. Stork, and J. B. Johnson, SiGe-channel heterojunction p-MOSFET's, IEEE 'Trans. Electron Devices, vol. 41, pp. 90-100. 1994.
-
(1994)
IEEE 'Trans. Electron Devices
, vol.41
, pp. 90-100
-
-
Verdonckt-Vandebroek, S.1
Crabbe, E.F.2
Meyerson, B.S.3
Haraine, D.L.4
Restle, P.J.5
Stork, J.6
Johnson, J.B.7
-
19
-
-
84954120486
-
High performance 0.25 /urn p-MOSFET's with silicon germanium channels for 300K and 77K operation
-
V. P. Kesan, S. Subbanna, P. J. Restle, M. J. Tejwani. J. M. Aitken, S. S. lyer, and J. A. Ott. High performance 0.25 /urn p-MOSFET's with silicon germanium channels for 300K and 77K operation, IEDM Tech. Dig., pp. 25-28, 1991.
-
(1991)
IEDM Tech. Dig.
, pp. 25-28
-
-
Kesan, V.P.1
Subbanna, S.2
Restle, P.J.3
Tejwani, M.J.4
Aitken, J.M.5
Lyer, S.S.6
Ott, J.A.7
-
20
-
-
28444459024
-
Mechanism and conditions for anomalous strain relaxation in graded thin films and superlattices
-
F. K. LeGoues, B. S. Meyerson, J. F. Morar, and P. D. Kirchner, Mechanism and conditions for anomalous strain relaxation in graded thin films and superlattices. J. Appl. Phys., vol. 71, pp. 4230-4243, 1992.
-
(1992)
J. Appl. Phys.
, vol.71
, pp. 4230-4243
-
-
Legoues, F.K.1
Meyerson, B.S.2
Morar, J.F.3
Kirchner, P.D.4
-
22
-
-
0001325698
-
New approach to the growth of iow dislocation relaxed SiGe material
-
A. Powell, F. K. LeGoues, and S. S. lyer, New approach to the growth of iow dislocation relaxed SiGe material, Appl Phvs. Lett., vol. 64, pp. 324-326, 1994.
-
(1994)
Appl Phvs. Lett.
, vol.64
, pp. 324-326
-
-
Powell, A.1
Legoues, F.K.2
Lyer, S.S.3
-
23
-
-
0018683243
-
Characterization of the electron mobility in the inverted (100) Si surface
-
A. G. Sabnis and J. T. Clemens, Characterization of the electron mobility in the inverted (100) Si surface, lEDMTech. Dig., pp. 18-21, 1979.
-
(1979)
LEDMTech. Dig.
, pp. 18-21
-
-
Sabnis, A.G.1
Clemens, J.T.2
-
24
-
-
33747026453
-
-
K. Ismail, private communication
-
K. Ismail, private communication.
-
-
-
-
25
-
-
0013242121
-
Oxidation studies of SiGe
-
F. K. LeGoues, R. Rosenberg, T. Nguyen, F. Himpsel, and B. S. Meyersen, Oxidation studies of SiGe, J. Appl. Phys., vol. 65, pp. 1724-1728, 1989.
-
(1989)
J. Appl. Phys.
, vol.65
, pp. 1724-1728
-
-
Legoues, F.K.1
Rosenberg, R.2
Nguyen, T.3
Himpsel, F.4
Meyersen, B.S.5
-
26
-
-
0029325291
-
Electrical properties of plasma-grown oxide on MBE-grown SiGe
-
I. S. Goh. J. F. Zhang, S. Hall, W. Hccleston, and K. Werner, Electrical properties of plasma-grown oxide on MBE-grown SiGe, Semicon. Sci. Technoi, vol. 10, pp. 818-828. 1995.
-
(1995)
Semicon. Sci. Technoi
, vol.10
, pp. 818-828
-
-
Goh, I.S.1
Zhang, J.F.2
Hall, S.3
Hccleston, W.4
Werner, K.5
-
27
-
-
33746991507
-
UHV/CVD growth of Si and Si : Ge alloys: Chemistry, physics and device applications
-
B. S. Meyerson, UHV/CVD growth of Si and Si : Ge alloys: Chemistry, physics and device applications, Proc. IEEE. vol. 80, pp. 1592-1608, 1992.
-
(1992)
Proc. IEEE.
, vol.80
, pp. 1592-1608
-
-
Meyerson, B.S.1
-
28
-
-
0003806761
-
-
New York: Wiley
-
R Eisberg and R. Resnick, Quantum Physics of Atoms, Molecules, Solids, Nuclei and Particles, 2nd ed. New York: Wiley, 1985.
-
(1985)
Quantum Physics of Atoms, Molecules, Solids, Nuclei and Particles, 2nd Ed.
-
-
Eisberg, R.1
Resnick, R.2
-
29
-
-
0027640789
-
Silicon MOS transconductance scaling into the overshoot regime
-
M. Pinto, E. Sangiori, and J. Bude, Silicon MOS transconductance scaling into the overshoot regime, IEEE Electron Device Lett, vol. 14, pp. 375-378. 1993.
-
(1993)
IEEE Electron Device Lett
, vol.14
, pp. 375-378
-
-
Pinto, M.1
Sangiori, E.2
Bude, J.3
-
30
-
-
33747001056
-
-
Technology Modeling Associates, Inc.
-
TMA MEDICI Version 2.0, Technology Modeling Associates, Inc., 1994.
-
(1994)
TMA MEDICI Version 2.0
-
-
-
32
-
-
0009509593
-
Carrier mobilities in silicon empirically related to doping and field
-
D. M. Caughey and R. E. Thomas. Carrier mobilities in silicon empirically related to doping and field, Proc. IEEE, vol. 55, pp. 2192-2193, 1967.
-
(1967)
Proc. IEEE
, vol.55
, pp. 2192-2193
-
-
Caughey, D.M.1
Thomas, R.E.2
-
33
-
-
0020763683
-
A mobility model for carriers in the MOS inversion layer
-
K. Yamaguchi, A mobility model for carriers in the MOS inversion layer, IEEE Trans, Electron Devices, vol. ED-30, pp. 658-663, 1983.
-
(1983)
IEEE Trans, Electron Devices
, vol.30 ED
, pp. 658-663
-
-
Yamaguchi, K.1
-
34
-
-
2542429019
-
Ultra-high-speed modulation-doped field-effect-transistors: A tutorial review
-
L. D. Nguyen, L. E. Larson, and U. K. Mishra, Ultra-high-speed modulation-doped field-effect-transistors: A tutorial review, Proc. IEEE. vol. 80, pp. 494-518, 1992.
-
(1992)
Proc. IEEE.
, vol.80
, pp. 494-518
-
-
Nguyen, L.D.1
Larson, L.E.2
Mishra, U.K.3
-
35
-
-
0024048459
-
The role of inefficient charge modulation in limiting the current-gain cutoff frequency of the MODFET
-
[34[ M. C. Foisy, P. J. Tasker, B. Hughes, and L. F. Eastman, The role of inefficient charge modulation in limiting the current-gain cutoff frequency of the MODFET, IEEE Trans. Electron Devices, vol. 35, pp. 871-877, 1988.
-
(1988)
IEEE Trans. Electron Devices
, vol.35
, pp. 871-877
-
-
Foisy, M.C.1
Tasker, P.J.2
Hughes, B.3
Eastman, L.F.4
-
36
-
-
0026735256
-
An improved energy transport model including nonparabolicity and non-Maxwellian distribution effects
-
D. Chen. E. Ran, U. Ravaioli, C.-W. Shu, and R. W. Button, An improved energy transport model including nonparabolicity and non-Maxwellian distribution effects, IEEE Electron Device Lett., vol. 13, pp. 26-28, 1992.
-
(1992)
IEEE Electron Device Lett.
, vol.13
, pp. 26-28
-
-
Chen, D.1
Ran, E.2
Ravaioli, U.3
Shu, C.-W.4
Button, R.W.5
-
37
-
-
0027245290
-
Silicon MOSFET's, the microwave device technology for the 90s
-
N. Camilleri, J. Costa, D. Lovelace, and D. Ngo, Silicon MOSFET's, the microwave device technology for the 90s, in Proc. IEEE MTT-S, 1993, pp. 545-548.
-
(1993)
Proc. IEEE MTT-S
, pp. 545-548
-
-
Camilleri, N.1
Costa, J.2
Lovelace, D.3
Ngo, D.4
-
38
-
-
0026046773
-
A deep-submicrometer microwave/digital CMOS/SOS technology
-
A. E. Schmilz, R. H. Waiden, L. E. Larson. S. E. Rosenbaum, R. A. Metzger, J. R. Behnke, and P. A. Macdonald, A deep-submicrometer microwave/digital CMOS/SOS technology, IEEE Electron Device Lett.. vol. 12, pp. 16 17, 1991.
-
(1991)
IEEE Electron Device Lett..
, vol.12
, pp. 1617
-
-
Schmilz, A.E.1
Waiden, R.H.2
Larson, L.E.3
Rosenbaum, S.E.4
Metzger, R.A.5
Behnke, J.R.6
Macdonald, P.A.7
-
39
-
-
84954120486
-
High performance 0.25 μm p-MOSFET's with silicongermanium channels for 300K and 77K operation
-
V. P. Kesan, S. Subbanna, P. J. Restle, M. J. Tejwani, J. Aitken, S. lyer, and J. Ott, High performance 0.25 μm p-MOSFET's with silicongermanium channels for 300K and 77K operation, IEDM Tech. Dig., pp. 25-28, 1991.
-
(1991)
IEDM Tech. Dig.
, pp. 25-28
-
-
Kesan, V.P.1
Subbanna, S.2
Restle, P.J.3
Tejwani, M.J.4
Aitken, J.5
Lyer, S.6
Ott, J.7
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