메뉴 건너뛰기




Volumn 23, Issue 4, 2000, Pages 617-622

An embedded overlay concept for microsystems packaging

Author keywords

Chip on flex; Microelectromechanical systems; Microsystems packaging

Indexed keywords

LASER ABLATION; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROOPTICS; MULTICHIP MODULES;

EID: 0034315241     PISSN: 15213323     EISSN: None     Source Type: Journal    
DOI: 10.1109/6040.883750     Document Type: Article
Times cited : (10)

References (10)
  • 1
    • 0030102259 scopus 로고    scopus 로고
    • New multichip-on-silicon packaging scheme for microsystems
    • L. Guerin, M. A. Schaer, R. Sachot, and M. Dutoit, "New multichip-on-silicon packaging scheme for microsystems," Sens. Actuators A, vol. 52, pp. 156-160, 1996.
    • (1996) Sens. Actuators A , vol.52 , pp. 156-160
    • Guerin, L.1    Schaer, M.A.2    Sachot, R.3    Dutoit, M.4
  • 2
    • 0000177861 scopus 로고    scopus 로고
    • Optoelectronic multichip modules for high-speed computer systems and communication networks
    • May
    • S. Koh, D. J. Sadler, and C. H. Ahn, "Optoelectronic multichip modules for high-speed computer systems and communication networks," Opt. Eng., vol. 36, no. 5, pp. 1319-1325, May 1997.
    • (1997) Opt. Eng. , vol.36 , Issue.5 , pp. 1319-1325
    • Koh, S.1    Sadler, D.J.2    Ahn, C.H.3
  • 4
    • 33645517090 scopus 로고    scopus 로고
    • Extension of high density interconnect multichip module technology for MEMS packaging
    • Sept.
    • J. Butler, V. Bright, R. Saia, and J. Comtois, "Extension of high density interconnect multichip module technology for MEMS packaging," Proc. SPIE, Micromachined Devices Comp. III, vol. 3224, pp. 169-177, Sept. 1997.
    • (1997) Proc. SPIE, Micromachined Devices Comp. III , vol.3224 , pp. 169-177
    • Butler, J.1    Bright, V.2    Saia, R.3    Comtois, J.4
  • 7
    • 0028513692 scopus 로고
    • Heat transfer and material removal in pulsed excimer-laser-induced ablation: Pulsewidth dependence
    • G. D'Couto and S. Babu, "Heat transfer and material removal in pulsed excimer-laser-induced ablation: Pulsewidth dependence," J. Appl. Phys., vol. 76, no. 5, pp. 3052-3058, 1994.
    • (1994) J. Appl. Phys. , vol.76 , Issue.5 , pp. 3052-3058
    • D'Couto, G.1    Babu, S.2
  • 9
    • 0027668512 scopus 로고
    • Thermal conductivity of CMOS materials for the optimization of microsensors
    • Mar.
    • O. Paul and H. Baltes, "Thermal conductivity of CMOS materials for the optimization of microsensors," J. Micromech. Microeng., no. 112, p. 110, Mar. 1993.
    • (1993) J. Micromech. Microeng. , Issue.112 , pp. 110
    • Paul, O.1    Baltes, H.2
  • 10
    • 0003370080 scopus 로고    scopus 로고
    • Scanning and rotating micromirrors using thermal actuators
    • July
    • J. Butler, V. Bright, and J. Reid, "Scanning and rotating micromirrors using thermal actuators," in Proc. SPIE, Opt. Scanning Syst., vol. 3131, July 1997, pp. 134-144.
    • (1997) Proc. SPIE, Opt. Scanning Syst. , vol.3131 , pp. 134-144
    • Butler, J.1    Bright, V.2    Reid, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.