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Volumn 23, Issue 4, 2000, Pages 623-630

3-D packaging methodologies for microsystems

Author keywords

[No Author keywords available]

Indexed keywords

CRACKS; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; MULTICHIP MODULES; PRINTED CIRCUIT BOARDS; STRESSES;

EID: 0034314980     PISSN: 15213323     EISSN: None     Source Type: Journal    
DOI: 10.1109/6040.883751     Document Type: Article
Times cited : (18)

References (21)
  • 1
    • 0029419437 scopus 로고
    • Packaging of mems devices
    • A. K. Hu and E. Green, "Packaging of mems devices," in Proc. SPIE, vol. 2624, 1995, pp. 273-279.
    • (1995) Proc. SPIE , vol.2624 , pp. 273-279
    • Hu, A.K.1    Green, E.2
  • 2
    • 0030100552 scopus 로고    scopus 로고
    • Packaging for silicon micromachined accelerometers
    • M. L. Kniffin and M. Shah, "Packaging for silicon micromachined accelerometers," int. J. Microcirc. Electron. Packag., vol. 19, pp. 75-86, 1996.
    • (1996) Int. J. Microcirc. Electron. Packag. , vol.19 , pp. 75-86
    • Kniffin, M.L.1    Shah, M.2
  • 7
    • 0005297350 scopus 로고
    • Packaging technologies for space based microsystems and their elements, in Microengineering Technology for Space Systems
    • H. Helvajian, Ed.
    • J. C. Lyke, Packaging technologies for space based microsystems and their elements, in Microengineering Technology for Space Systems, H. Helvajian, Ed., Aerosp. Rep. ATR-95(8168)-2, pp. 131-180, 1995.
    • (1995) Aerosp. Rep. ATR-95(8168)-2 , pp. 131-180
    • Lyke, J.C.1
  • 9
    • 0005256236 scopus 로고
    • The 3-D interconnection: Applications for mass memory and microprocessors
    • C. Val and M. Leroy, "The 3-D interconnection: Applications for mass memory and microprocessors," in Proc. ISHM Conf., 1991, pp. 62-68.
    • (1991) Proc. ISHM Conf. , pp. 62-68
    • Val, C.1    Leroy, M.2
  • 15
    • 33749918597 scopus 로고    scopus 로고
    • Microsystem packaging in plastic and in 3-D
    • G. Kelly, J. Alderman, and A. Morrissey, "Microsystem packaging in plastic and in 3-D," in Proc. SPIE, vol. 3224, 1997, pp. 142-152.
    • (1997) Proc. SPIE , vol.3224 , pp. 142-152
    • Kelly, G.1    Alderman, J.2    Morrissey, A.3
  • 19
    • 0028386569 scopus 로고
    • Enhanced performance of potassium chemfets by the optimization of a polysiloxane membrane
    • Z. Brzozka, H. A. J. Holterman, G. W. N. Honig, and U. M. Verherk, "Enhanced performance of potassium chemfets by the optimization of a polysiloxane membrane," Sens. Actuators B, vol. 18-19, no. 41, p. 38, 1994.
    • (1994) Sens. Actuators B , vol.18-19 , Issue.41 , pp. 38
    • Brzozka, Z.1    Holterman, H.A.J.2    Honig, G.W.N.3    Verherk, U.M.4
  • 20
    • 0029275381 scopus 로고
    • Durable chemical sensors based on a field-effect transistor
    • D. N. Reinhoudt, "Durable chemical sensors based on a field-effect transistor," Sens. Actuators B, vol. 24-25, pp. 197-200, 1995.
    • (1995) Sens. Actuators B , vol.24-25 , pp. 197-200
    • Reinhoudt, D.N.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.