Nanofabrication using structure controlled hydrogenated Si clusters deposited on Si surfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3497-3500

  Kanayama, Toshihiko ^a   Watanabe, Miyoko O ^b   Bolotov, Leonid ^b   Uchida, Noriyuki ^a  

^a NATL INST FOR ADV INTERDISC RES   (Japan)

^b JRCAT   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; CHEMICAL BONDS; DEPOSITION; ELECTRIC POTENTIAL; HYDROGENATION; ION BEAMS; IONIZATION; KINETIC ENERGY; NANOSTRUCTURED MATERIALS; POSITIVE IONS; SCANNING TUNNELING MICROSCOPY; SURFACES;

CLUSTER IONS; ELECTRIC DIPOLE FORCES; NANOFABRICATION;

SEMICONDUCTING SILICON;

EID: 0034314740     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1324620     Document Type: Article

References (19)

1. A. P. Alivisatos, Science 271, 933 (1996).
2. M. O. Watanabe, N. Uchida, and T. Kanayama, Eur. Phys. J. D 9, 571 (1999).
3. T. Kanayama, Jpn. J. Appl. Phys., Part 2 33, L1792 (1994).
4. S. G. Hall. H. Murakami, R. E. Palmer, and T. Kanayama, Jpn. J. Appl. Phys., Part 2 36, L639 (1997).
5. T. Kanayama and H. Murakami. J. Vac. Sci. Technol. B 15, 2882 (1997).
6. H. Murakami and T. Kanayama, Appl. Phys. Lett. 67, 2341 (1995).
7. M. O. Watanabe, H. Murakami, T. Miayzaki, and T. Kanayama, Appl. Phys. Lett. 71, 1207 (1997).
8. M. O. Watanabe and T. Kanayama, Appl. Phys. A: Mater. Sci. Process. 66, S1039 (1998).
9. M. O. Watanabe, N. Kawashima, and T. Kanayama, J. Phys. D 31, L63 (1998).
10. K. Raghavachari and C. M. Rohlfing, J. Chem. Phys. 89, 2219 (1988).
11. K. Raghavachari, Phase Transit. 24-26, 61 (1990), and references therein.
12. M. F. Jarrold, Science 252, 1085 (1991).
13. T. Miyazaki, T. Uda, I. Stich, and K. Terakura, Chem. Phys. Lett. 261, 346 (1996).
14. T. Miyazaki, T. Uda, I. Stich, and K. Terakura, Chem. Phys. Lett. 284, 12 (1998).
15. M. O. Watanabe, N. Uchida, and T. Kanayama, Phys. Rev. B 61, 7219 (2000).
16. M. O. Watanabe, T. Miyazaki, and T. Kanayama, Phys. Rev. Lett. 81, 5362 (1998).
17. L. Bolotov, N. Uchida, and T. Kanayama, Surf. Sci. 462, 85 (2000).
18. R. A. Wolkow and D. J. Moffatt, J. Chem. Phys. 103, 10696 (1995).
19. I.-S. Hwang, M.-S. Ho, and T. T. Tsong, Phys. Rev. Lett. 83, 120 (1999).