Transmission phase gratings for EUV interferometry

Journal of Synchrotron Radiation

Volumn 7, Issue 6, 2000, Pages 405-410

  Naulleau, Patrick P ^a   Cho, Chang Hyun ^b   Gullikson, Eric M ^a   Bokor, Jeffrey ^a,b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Diffraction; EUV; Interferometry; Phase gratings

Indexed keywords

EID: 0034311549     PISSN: 09090495     EISSN: None     Source Type: Journal    
DOI: 10.1107/S0909049500010670     Document Type: Article

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