Effects of metal ion post-implantation on the near surface properties of TiN deposited by CVD

Surface and Coatings Technology

Volumn 133-134, Issue , 2000, Pages 203-207

  Perry, Anthony J ^a,c   Manory, Rafael R ^b,d   Ward, Liam P ^b   Kavuri, Premsagar P ^b  

^a AIMS Marketing   (United States)

^b RMIT UNIVERSITY   (Australia)

^c AIMS Consullting   (Switzerland)

^d OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FRICTION; HARDENING; ION IMPLANTATION; RESIDUAL STRESSES; SUBSTRATES; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY; TRIBOLOGY; WEAR RESISTANCE;

METAL ION IMPLANTATION;

TITANIUM NITRIDE;

COATING; FRICTION; ION IMPLANTATION; TITANIUM NITRIDE; VAPOR DEPOSITION;

EID: 0034310616     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00942-7     Document Type: Article

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