Some effects of ion beam treatments on titanium nitride coatings of commercial quality

Surface and Coatings Technology

Volumn 114, Issue 2-3, 1999, Pages 137-142

  Manory, Rafael R ^a   Perry, Anthony J ^b   Rafaja, David ^c   Nowak, Roman ^d  

^a RMIT UNIVERSITY   (Australia)

^b AIMS Marketing   (United States)

^c CHARLES UNIVERSITY   (Czech Republic)

^d HIROSHIMA UNIVERSITY   (Japan)

Author keywords

GIXRD; Hardness; Ion implantation; TiN

Indexed keywords

DEPTH SENSING MICROINDENTATION; GLANCING INCIDENCE X RAY DIFFRACTION;

AMORPHIZATION; CUTTING TOOLS; ION IMPLANTATION; MICROHARDNESS; RESIDUAL STRESSES; STRAIN; STRUCTURE (COMPOSITION); TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

COATINGS;

EID: 0032647605     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00048-1     Document Type: Article

References (19)

1. Perry A.J., Treglio J.R., Bhat D.G., Boppana S.P., Kattamis T.Z., Schlichting K., Dearnaley G., Geist D.E. Surf. Coat. Technol. 68/69:1994;294.
2. Chollet L., Perry A.J. Thin Solid Films. 123:1985;223.
3. Geist D.E., Perry A.J., Treglio J.R., Valvoda V., Rafaja D. Adv. X-ray Anal. 38:1995;471.
4. Perry A.J., Valvoda V., Rafaja D., Williamson D.L., Sartwell B.D. Surf. Coat. Technol. 54/55:1992;180.
5. Thornton J. Annu. Rev. Mater. Sci. 7:1977;239.
6. Braun M. Nucl. Instrum. Methods B. 59:1991;914.
7. Culbertson R., Burns F.C., Franzen W., Lowder L.J., Ricca J.J., Gonzales A. Nucl. Instrum. Methods B. 56/57:1991;652.
8. Walter J.L., Kelly G.W., Minnear W.P. Wear. 170:1993;79.
9. Liu L.J., Sood D.K., Manory R. Mater. Res. Soc. Symp. Proc. 279:1993;469.
10. Liu L.J., Sood D.K., Manory R.R., Zhou W. Surf. Coat. Technol. 71:1995;151.
11. Kulkarni A., Mate N., Kanektar S.M., Ogale S.B., Wagh B.G. Surf. Coat. Technol. 54/55:1992;508.
12. Roos J.R., Celis J.P., Frank M. Surf. Coat. Technol. 45:1991;89.
13. Manory R.R., Liu L.J., Sood D.K., Shao Z.M., Kylner C., Braun M. Surf. Coat. Technol. 70:1994;1.
14. Manory R.R., Li C.L., Fountzoulas C., Demaree J.D., Hirvonen J.K., Nowak R. Mater. Sci. Eng. A. 253:1998;319.
15. Perry A.J., Manory R., Rafaja D., Nowak R. Vacuum. 49:1998;89.
16. Rafaja D., Valvoda V., Perry A.J., Treglio J.R. Surf. Coat. Technol. 92:1997;135.
17. Nowak R., Horino Y., Ando Y., Maruno S. Appl. Phys. Lett. 68:1996;3743.
18. Nowak R., Yoshida F., Morgiel J., Major B. J. Appl. Phys. 85:1999;841-852.
19. Sharkeev Y., Perry A.J., Fortuna S.V. Surf. Coat. Technol. 108/109:1998;419.