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Volumn 59, Issue 1, 2000, Pages 210-219
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CxFy polymer film deposition in DC and RF fluorinert vapor plasmas
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Author keywords
[No Author keywords available]
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Indexed keywords
DECOMPOSITION;
DIELECTRIC FILMS;
ELECTRIC BREAKDOWN OF SOLIDS;
FLUORINE CONTAINING POLYMERS;
FLUOROCARBONS;
FREE RADICALS;
PERMITTIVITY;
PLASMA APPLICATIONS;
PRESSURE EFFECTS;
REACTION KINETICS;
VAPOR DEPOSITION;
VAPOR PRESSURE;
PLASMA DEPOSITION;
PLASTIC FILMS;
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EID: 0034300807
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(00)00272-4 Document Type: Article |
Times cited : (11)
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References (11)
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