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Volumn 59, Issue 1, 2000, Pages 210-219

CxFy polymer film deposition in DC and RF fluorinert vapor plasmas

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; DIELECTRIC FILMS; ELECTRIC BREAKDOWN OF SOLIDS; FLUORINE CONTAINING POLYMERS; FLUOROCARBONS; FREE RADICALS; PERMITTIVITY; PLASMA APPLICATIONS; PRESSURE EFFECTS; REACTION KINETICS; VAPOR DEPOSITION; VAPOR PRESSURE;

EID: 0034300807     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00272-4     Document Type: Article
Times cited : (11)

References (11)
  • 10
    • 0343188499 scopus 로고
    • NATO ASI Series. Berlin: Springer
    • Sakai Y, Tagashira H. NATO ASI Series. Berlin: Springer, 1993. p. 193.
    • (1993) , pp. 193
    • Sakai, Y.1    Tagashira, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.