Failure analysis using the infrared optical-beam-induced resistance-CHange (IR-OBIRCH) method

NEC Research and Development

Volumn 41, Issue 4, 2000, Pages 359-363

  Nikawa, Kiyoshi ^a   Morimoto, Kazuyuki ^a   Inoue, Shoji ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RANDOM ACCESS STORAGE; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; FAILURE ANALYSIS; INFRARED IMAGING; LASER APPLICATIONS; LASER BEAMS; LSI CIRCUITS;

AUTOMATED TEST EQUIPMENT; FUNCTIONAL FAILURE; INFRARED OPTICAL BEAM INDUCED RESISTANCE CHANGE; LASER BEAM HEATING; STATIC FAILURE;

INTEGRATED CIRCUIT TESTING;

EID: 0034291793     PISSN: 0547051X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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3. K. Nikawa and S. Inoue, European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ADERA, France, pp.307-312, 1995.
4. K. Nikawa and S. Inoue, IEICE Trans. on Inf. & Syst., E81-D, pp.743-748, 1998.
5. K. Nikawa and S. Inoue, Int. Rel. Phys. Symp., IEEE, pp.346-354, 1996.
6. K. Nikawa and S. Inoue, Int. Symp. Testing and Failure Analysis, ASM International, pp.387-397, 1996.
7. K. Nikawa, T. Saiki, et al., Appl. Phys. Lett., 74, 7, 15 February, pp. 1048-1050, 1999.
8. K. Nikawa and S. Inoue, Sixth Asian Test Symposium, IEEE, pp.214-219, 1997.
9. K. Nikawa and S. Inoue, Eighth Asian Test Symposium, IEEE, pp.394-399, 1999.