MAMOS - a novel displacement sensitive transducer for fully digital integrated accelerometer

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 345-350

  Yee, Y ^a   Park, M ^a   Lee, S H ^a   Lee, S ^a   Chun, K ^a   Kim, Y K ^a   Cho, D i D ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ANNEALING; CMOS INTEGRATED CIRCUITS; ETCHING; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MOSFET DEVICES; SEMICONDUCTOR DOPING; SENSITIVITY ANALYSIS; TRANSDUCERS;

CURRENT CONTROLLED RING OSCILLATOR; INTEGRATED DIGITAL ACCELEROMETERS;

ACCELEROMETERS;

EID: 0031677950     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)