Generic micromachined silicon platform for high-performance RF passive components

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 365-371

  Ziaie, Babak ^a   Najafi, Khalil ^b  

^a University of Minnesota   (United States)

^b The Department of Civil and Environmental Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMBRANES; MICROMACHINING; SURFACE MOUNT TECHNOLOGY;

DIELECTRIC MEMBRANES;

SILICON WAFERS;

EID: 0034274215     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/310     Document Type: Article

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