Electrical characterization of an rf planar magnetron in inert gases

Journal of Physics D: Applied Physics

Volumn 33, Issue 15, 2000, Pages 1884-1893

  Minea, T M ^a   Bretagne, J ^a   Pagnon, D ^a   Touzeau, M ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CURRENT MEASUREMENT; ELECTRON EMISSION; MAGNETRON SPUTTERING; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; VOLTAGE MEASUREMENT;

MAGNETRON DISCHARGES;

ELECTRIC DISCHARGES;

EID: 0034249663     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/15/319     Document Type: Article

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