Fabrication of accelerometer using Single-step Electrochemical Etching for Micro Structures (SEEMS)

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 61-65

  Ohji, H ^a   Gennissen, P T J ^a   French, P J ^a   Tsutsumi, K ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ETCHING; MASKS;

SINGLE-STEP ELECTROCHEMICAL ETCHING FOR MICRO-STRUCTURES (SEEMS);

MICROMACHINING;

EID: 0032666292     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746753     Document Type: Conference Paper

References (12)