Thin-film deposition of Cu2O by reactive radio-frequency magnetron sputtering

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 8 A, 2000, Pages

  Ishizuka, Shogo ^a   Maruyama, Takahiro ^a   Akimoto, Katsuhiro ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ENERGY GAP; MAGNETRON SPUTTERING; SEMICONDUCTING FILMS; SOLAR CELLS; SPUTTER DEPOSITION; SUBSTRATES;

REACTIVE RADIOFREQUENCY MAGNETRON SPUTTERING;

COPPER OXIDES;

EID: 0034246349     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.l786     Document Type: Article

References (14)

1. B. P. Rai: Sol. Cells 25 (1988) 265.
2. L. C. Olsen, F. W. Addis and W. Miller: Sol. Cells 7 (1982-1983) 247.
3. E. Fortin and D. Masson: Solid-State Electron. 25 (1982) 281.
4. L. Papadimitriou and N. A. Economou: Sol. Cells 3 (1981) 73.
5. A. A. Berezin and F. L. Weichman: Solid State Commun. 37 (1981) 157.
6. J. Herion: Appl. Phys. Lett. 34 (1979) 599.
7. W. Siripala, L. D. R. D. Perera, K. T. L. De Silva, J. K. D. S. Jayanetti, I. M. Dharmadasa: Sol. Energy Mater. 44 (1996) 251.
8. L. C. Olsen and R. C. Bohara: Proc. 11th IEEE Photovoltaic Specialists Conf. New York, 1975 (New York, 1975) p. 381.
9. H. Matsumura, A. Fujii and T. Kitatani: Jpn. J. Appl. Phys. 35 (1996) 5631.
10. T. Kosugi and S. Kaneko: J. Am. Ceram. Soc. 81 (1998) 3117.
11. K. Kawaguchi, R. Kita, M. Nishiyama and T. Morishita: J. Cryst. Growth 143 (1994) 221.
12. R. Padiyath, J. Seth and S. V. Babu: Thin Solid Films 239 (1994) 8.
13. A. Parretta, M. K. Jayaraj, A. Di Nocera, S. Loreti, L. Quercia and A. Agati: Phys. Status Solidi (a) 155 (1996) 399.
14. V. F. Drobny and D. L. Pulfrey: Thin Solid Films 61 (1979) 89.