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Volumn 47, Issue 7, 2000, Pages 1416-1420

Time dependent breakdown of ultrathin gate oxide

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DIELECTRIC MATERIALS; ELECTRIC BREAKDOWN; ELECTRIC FIELD EFFECTS; ELECTRON TRANSPORT PROPERTIES; MOS CAPACITORS; RELIABILITY; THERMAL EFFECTS;

EID: 0034230311     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.848285     Document Type: Article
Times cited : (55)

References (14)
  • 1
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    • Crook, D.1
  • 2
    • 0018700715 scopus 로고
    • Low field time dependent dielectric integrity
    • E. S. Anolick and G. Nelson, "Low field time dependent dielectric integrity," in IEEE-IRPS Proc., vol. 7, 1979, p. 8.
    • (1979) IEEE-IRPS Proc. , vol.7 , pp. 8
    • Anolick, E.S.1    Nelson, G.2
  • 3
    • 0019656053 scopus 로고
    • Time zero dielectric reliability test by a ramp method
    • A. Berman, "Time zero dielectric reliability test by a ramp method," in IEEE-IRPS Proc., vol. 19, 1981, p. 204.
    • (1981) IEEE-IRPS Proc. , vol.19 , pp. 204
    • Berman, A.1
  • 4
    • 0001816794 scopus 로고
    • Acceleration parameters for thin gate oxide stressing
    • J. W. McPherson and D. A. Baglee, "Acceleration parameters for thin gate oxide stressing," Proc. IEEE-IRPS, vol. 23, p. 1, 1985.
    • (1985) Proc. IEEE-IRPS , vol.23 , pp. 1
    • McPherson, J.W.1    Baglee, D.A.2
  • 5
    • 0022107573 scopus 로고
    • Acceleration parameters for thin oxide breakdown
    • _, "Acceleration parameters for thin oxide breakdown," J. Electrochem. Soc., vol. 132, p. 1903, 1985.
    • (1985) J. Electrochem. Soc. , vol.132 , pp. 1903
  • 8
    • 0011076409 scopus 로고    scopus 로고
    • 2 thin films
    • 2 thin films," J. Appl. Phys., vol. 84, p. 1513, 1998.
    • (1998) J. Appl. Phys. , vol.84 , pp. 1513
  • 10
    • 0023849054 scopus 로고
    • Statistical modeling of silicon dioxide reliability
    • J. Lee, I. C. Chen, and C. Hu, "Statistical modeling of silicon dioxide reliability," in Proc. IEEE-IRPS , vol. 26, 1988, p. 131.
    • (1988) Proc. IEEE-IRPS , vol.26 , pp. 131
    • Lee, J.1    Chen, I.C.2    Hu, C.3
  • 11
    • 0001850832 scopus 로고
    • Hole injection oxide breakdown model for very low voltage lifetime extrapolation
    • K. F. Schuegraph and C. Hu, "Hole injection oxide breakdown model for very low voltage lifetime extrapolation," in Proc. IEEE-IRPS , vol. 31, 1993, p. 7.
    • (1993) Proc. IEEE-IRPS , vol.31 , pp. 7
    • Schuegraph, K.F.1    Hu, C.2
  • 13
    • 0030719061 scopus 로고    scopus 로고
    • Oxide breakdown mechanism and quantum physical chemistry for time-dependent dielectric breakdown
    • M. Kimura, "Oxide breakdown mechanism and quantum physical chemistry for time-dependent dielectric breakdown," Proc. IEEE-IRPS , vol. 35, p. 190, 1997.
    • (1997) Proc. IEEE-IRPS , vol.35 , pp. 190
    • Kimura, M.1
  • 14
    • 21544467967 scopus 로고
    • Trap creation in Si dioxide produced by hot electrons
    • D. J. DiMaria and J. W. Stasiak, "Trap creation in Si dioxide produced by hot electrons," J. Appl. Phys., vol. 65, p. 2342, 1989.
    • (1989) J. Appl. Phys. , vol.65 , pp. 2342
    • DiMaria, D.J.1    Stasiak, J.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.