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Volumn 47, Issue 7, 2000, Pages 1416-1420
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Time dependent breakdown of ultrathin gate oxide
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
DIELECTRIC MATERIALS;
ELECTRIC BREAKDOWN;
ELECTRIC FIELD EFFECTS;
ELECTRON TRANSPORT PROPERTIES;
MOS CAPACITORS;
RELIABILITY;
THERMAL EFFECTS;
TIME DEPENDENT DIELECTRIC BREAKDOWN;
ULTRATHIN GATE OXIDE;
GATES (TRANSISTOR);
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EID: 0034230311
PISSN: 00189383
EISSN: None
Source Type: Journal
DOI: 10.1109/16.848285 Document Type: Article |
Times cited : (55)
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References (14)
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