Identification of prismatic slip bands in 4H SiC boules grown by physical vapor transport

Journal of Electronic Materials

Volumn 29, Issue 7, 2000, Pages

  Ha, Seoyong ^a   Nuhfer, Noel T ^a   Rohrer, Gregory S ^a   De Graef, Marc ^a   Skowronski, Marek ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; CRYSTAL GROWTH; CRYSTAL ORIENTATION; DISLOCATIONS (CRYSTALS); ENERGY GAP; ETCHING; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY;

BURGERS VECTOR; PHYSICAL VAPOR TRANSPORT; PRISMATIC SLIP BANDS; SILICON CARBIDE BOULES; THREADING DISLOCATION ARRAYS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0034229977     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-000-0194-1     Document Type: Article

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