Scanning tunneling microscopy study of surface morphology of Si(111) after synchrotron radiation stimulated desorption of SiO2

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 I, 2000, Pages 1153-1157

  Gao, Y ^a,b   Mekaru, H ^a   Miyamae, T ^a,c   Urisu, T ^a  

^a INSTITUTE FOR MOLECULAR SCIENCE   (Japan)

^b UNIVERSITY OF ROCHESTER   (United States)

^c NATL INST OF MAT AND CHEM RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION; MORPHOLOGY; PHOTOEMISSION; SCANNING TUNNELING MICROSCOPY; SILICA; SYNCHROTRON RADIATION; X RAY SPECTROSCOPY;

SYNCHROTRON RADIATION STIMULATED DESORPTION;

SEMICONDUCTING SILICON;

EID: 0034227255     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582316     Document Type: Article

References (27)

1. J. Takahashi, Y. Utsumi, H. Akazawa, I. Kawashima, and T. Urisu, Appl. Phys. Lett. 58, 2776 (1991).
2. J. Takahashi, Y. Utsumi, and T. Urisu, J. Appl. Phys. 70, 2958 (1991).
3. H. Akazawa, Y. Utsumi, J. Takahashi, and T. Urisu, Appl. Phys. Lett. 57, 2302 (1991).
4. T. Urisu and H. Kyuragi, J. Vac. Sci. Technol. B 5, 1436 (1987).
5. K. Mase, M. Nagasono, S. Tanaka, T. Urisu, E. Ikenaga, T. Sekitani, and K. Tanaka, Surf. Sci. 390, 97 (1997).
6. H. Akazawa, J. Takahashi, Y. Utsumi, I. Kawashima, and T. Urisu, J. Vac. Sci. Technol. A 9, 2653 (1991).
7. T. Miyamae, H. Uchida, I. H. Munro, and T. Urisu, J. Vac. Sci. Technol. A 17, 1 (1999).
8. X.-S. Wang, J. L. Goldberg, N. C. Bartelt, T. L. Einstein, and E. D. Williams, Phys. Rev. Lett. 65, 2430 (1990).
9. J. L. Goldberg, X.-S. Wang, J. Wei, N. C. Bartelt, and E. D. Williams, J. Vac. Sci. Technol. A 9, 1868 (1991).
10. R. Trump, G. W. Rubloff, P. Balk, F. K. LeGoues, and J. Van Loenen, Phys. Rev. Lett. 55, 2332 (1985).
11. R. S. Becker, T. Klitsner, and J. S. Vickers, Phys. Rev. B 38, 3537 (1988).
12. Y. Kobayashi and K. Sugii, J. Vac. Sci. Technol. A 10, 2308 (1992).
13. H. Tochihara, W. Shimada, M. Itoh, H. Tanaka, M. Udagawa, and I. Sumita, Phys. Rev. B 45, 11332 (1992).
14. Ph. Avouris and R. Wolkow, Phys. Rev. B 39, 5091 (1989).
15. I.-S. Hwang, R.-L. Lo, and T. T. Tsong, Phys. Rev. Lett. 78, 4797 (1997).
16. C. Alfonso, J. C. Heyraud, and J. J. Metois, Surf. Sci. Lett. 291, 745 (1993).
17. A. Ichimiya, Y. Tanaka, and K. Ishiyama, Phys. Rev. Lett. 76, 4721 (1996).
18. K. E. Johnson and T. Engel, Phys. Rev. Lett. 69, 339 (1992).
19. H. Watanabe, K. Fujita, and M. Ichikawa, Appl. Phys. Lett. 70, 1095 (1997).
20. Y. K. Sun, D. J. Bonser, and T. Engel, Phys. Rev. B 43, 14309 (1991).
21. F. J. Himpsel, F. R. McFeely, A. Taleb-Ibrahimi, and J. A. Yarmoff, Phys. Rev. B 38, 6084 (1988).
22. K. Takayanagi, Y. Tanishiro, S. Takahashi, and M. Takahashi, Surf. Sci. 164, 367 (1985).
23. R. J. Pechman, X.-W. Wang, and J. H. Weaver, Phys. Rev. B 52, 11412 (1995).
24. B. S. Itchkawitz, M. T. McEllistrem, and J. J. Boland, Phys. Rev. Lett. 78, 98 (1997).
25. J. J. Boland and J. H. Weaver, Phys. Today 34 (1998).
26. M. Fouchier and J. J. Boland, Phys. Rev. B 57, 8997 (1998).
27. K. Nakayama and J. H. Weaver, Phys. Rev. Lett. 82, 980 (1999).