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Thin Solid Films

Volumn 369, Issue 1, 2000, Pages 297-305

Si/SiGe/Si pMOS performance - alloy scattering and other considerations

(2) Whall, T E a Parker, E H C a

a UNIVERSITY OF WARWICK (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CHARGE CARRIERS; CMOS INTEGRATED CIRCUITS; FIELD EFFECT SEMICONDUCTOR DEVICES; HETEROJUNCTIONS; INTERFACES (MATERIALS); MORPHOLOGY; MOS DEVICES; SEMICONDUCTING SILICON; SILICON ALLOYS; SURFACE ROUGHNESS; THIN FILMS;

ALLOY SCATTERING; COMPOSITIONAL INHOMOGENEITY;

SEMICONDUCTING FILMS;

EID: 0034227226 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(00)00883-X Document Type: Article

Times cited : (34)

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