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Microelectronic Engineering

Volumn 53, Issue 1, 2000, Pages 187-190

Direct electron beam writing of nanostructures using passivated gold clusters

(4) Bedson, T R a Nellist, P D a Palmer, R E a Wilcoxon, J P b

a UNIVERSITY OF BIRMINGHAM (United Kingdom)

b SANDIA NATIONAL LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ENERGY DISPERSIVE SPECTROSCOPY; GOLD; GRAPHITE; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; ORGANOMETALLICS; SCANNING ELECTRON MICROSCOPY; X RAY ANALYSIS;

DIRECT ELECTRON BEAM WRITING; ENERGY DISPERSIVE X RAY ANALYSIS; HIGHLY ORIENTED PYROLYTIC GRAPHITE; METALLIC NANOSTRUCTURES; PASSIVATED GOLD CLUSTERS;

MICROELECTRONIC PROCESSING;

EID: 0034206353 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(00)00293-8 Document Type: Article

Times cited : (7)

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