Mesa-spacers: enabling nondestructive measurement of surface energy in room temperature wafer bonding

Journal of the Electrochemical Society

Volumn 147, Issue 6, 2000, Pages 2343-2346

  Pasquariello, Donato ^a   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CRACKS; ELASTICITY; ENERGY GAP; INTERFACES (MATERIALS); INTERFACIAL ENERGY; SINGLE CRYSTALS; THERMAL EFFECTS;

MESA SPACER METHOD; NONDESTRUCTIVE MEASUREMENT; RAZOR BLADE METHOD; WAFER BONDING;

SILICON WAFERS;

EID: 0034205041     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393533     Document Type: Article

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