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Volumn 15, Issue 5, 2000, Pages 1062-1068

Abnormal grain growth of sputtered CuNi(Mn) thin films

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COPPER COMPOUNDS; DENSIFICATION; GRAIN GROWTH; SCANNING ELECTRON MICROSCOPY; SPUTTERING; STRESS RELAXATION; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 0034190854     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2000.0153     Document Type: Article
Times cited : (3)

References (33)
  • 11
    • 0028715275 scopus 로고
    • Materials Reliability in Microelectronics IV, edited by P. Børgesen, W. Filter, J.E. Sanches, Jr., K.P. Rodbell, and J.C. Coburn (Pittsburgh, PA)
    • (1994) Mater. Res. Soc. Symp. Proc. , vol.338 , pp. 215
    • Venkatraman, R.1
  • 14
    • 85037016024 scopus 로고    scopus 로고
    • Ph.D. Thesis, University of Stuttgart, Germany
    • (1996)
    • Keller, R.-M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.