Apparatus for the laser-optical measurement of stress in thin films: Results on CuNi

Review of Scientific Instruments

Volumn 69, Issue 10, 1998, Pages 3662-3665

  Bruckner W ^a   Griessmann, H ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039254934     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149155     Document Type: Article

References (18)

1. W. D. Nix, Metall. Trans. A 20A, 2217 (1989).
2. M. F. Doerner and W. D. Nix, CRC Crit. Rev. Solid State Mater. Sci. 14, 225 (1988).
3. I. Nishino, Y. Ichinose, Y. Sorimachi, and I. Tsubata, Int. J. Hybrid Microelectron. 6, 18 (1985).
4. W. Brückner, S. Baunack, D. Elefant, and G. Reiss, J. Appl. Phys. 79, 8516 (1996).
5. W. Brückner, J. Edelmann, H. Vinzelberg, G. Reiss, and Th. Knuth, Thin Solid Films 280, 227 (1996).
6. W. Brückner, F. Macionczyk, and G. Reiss, Mater. Res. Soc. Symp. Proc. 436, 47 (1997).
7. W. Brückner, S. Baunack, G. Reiss, G. Leitner, and Th. Knuth, Thin Solid Films 258, 252 (1995).
8. W. Brückner, W. Pitschke, S. Baunack, J. Thomas, and G. Reiss, J. Mater. Res. (to be published).
9. E. I. Bromley, J. N. Randall, D. C. Flanders, and R. W. Mountain, J. Vac. Sci. Technol. B 1, 1364 (1983).
10. S. Radha and B. S. Ramprasad, Nondestr. Test. Eval. 8-9, 949 (1992).
11. R. Koch, H. Leonhard, G. Thurner, and R. Abermann, Rev. Sci. Instrum. 61, 3859 (1990).
12. M. Moske and K. Samwer, Rev. Sci. Instrum. 59, 2012 (1988).
13. P. A. Flinn, D. S. Gardner, and W. D. Nix, IEEE Trans. Electron Devices ED-34, 689 (1987).
14. S. N. Sahu, J. Scarminio, and F. Decker, J. Electrochem. Soc. 137, 1150 (1990).
15. F. J. von Preissig and W. D. Nix, Mater. Res. Soc. Symp. Proc. 239, 207 (1992).
16. M. Weber, R. Koch, and K. H. Rieder, Phys. Rev. Lett. 73, 1166 (1994).
17. D. Sander, A. Enders, and J. Kirschner, Rev. Sci. Instrum. 66, 4734 (1995).
18. W. Brückner, S. Baunack, W. Pitschke, and J. Thomas, Mater. Res. Soc. Symp. Proc. (to be published).