Infrared study of Si surfaces and bonded Si wafers

Semiconductor Science and Technology

Volumn 14, Issue 1, 1999, Pages 70-73

  Milekhin, A ^a,b   Friedrich, M ^a   Hiller, K ^a   Wiemer, M ^a   Gessner, T ^a   Zahn, D R T ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTROMAGNETIC WAVE ATTENUATION; ELECTROMAGNETIC WAVE REFLECTION; PHONONS; SEMICONDUCTOR DEVICE STRUCTURES; SILICA; WATER;

ATTENUATED TOTAL REFLECTION (ATR);

SILICON WAFERS;

EID: 0032760446     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/14/1/009     Document Type: Article

References (20)

1. Chabal Y J 1988 Surf. Sci. Rep. 8 (5-7) 211
2. Ling L, Kuwabara S, Abe T and Shimura F 1993 J. Appl. Phys. 73 (6) 3018
3. Niwano M, Kageyama J, Kinashi K and Miyamoto N 1994 J. Vac. Sci. Technol. A 12 465
4. Weldon M K, Stefanov B B, Raghavachari K and Chabal Y J 1997 Phys. Rev. Lett. 79 2851
5. Chabal Y J, Higashi G S, Raghavachari K and Burrow V A 1989 J. Vac. Sci. Technol. A 7 2104
6. Chabal Y J 1986 Surf. Sci. 168 594
7. Niwano M, Kageyama J, Kurita K, Kinashi K, Takahashi I and Miyamoto N 1994 J. Appl. Phys. 76 (4) 2157
8. Gösele H and Stenzel H 1995 Electrochem. Soc. Proc. 95-7 33
9. Feijoo D, Chabal Y J and Christman S B 1994 Appl.Phys. Lett. 65 2548
10. Chabal Y J, Feijoo D, Christman S B and Goodwin C A 1995 Electrochem. Soc. Proc. 95-7 305
11. Weldon M K, Chabal Y J, Christman S B, Chaban E E, Feldman L C and Hamann D R 1996 J. Vac. Sci. Technol. B 14 3095
12. Weldon M K et al 1997 J. Vac. Sci. Technol. B 15 1065
13. Tong Q-Y and Gösele U 1995 Electrochem. Soc. Proc. 95-778
14. Weldon M K, Marsico V E, Chabal Y J, Hamann D R, Christman S B and Chaban E E 1979 Surf. Sci. 368 163
15. Iler R K 1979 The Chemistry of Silica (New York: Wiley) pp 622-729
16. Simons W W (ed) 1978 Sadtler Handbook of Infrared Spectra (Philadelphia, PA: Sadtler)
17. Krishnan K, Stout P J and Watanabe M 1990 Practical Fourier Transform Infrared Spectroscopy ed J R Ferraro and K Krishnan (San Diego, CA: Academic) pp 285-349
18. Dumas P, Chabal Y J and Jakob P 1992 Surf. Sci. 269-270 867
19. Han S M and Aydil E S 1997 Appl. Phys. Lett. 70 3269
20. Ogawa H and Hattori T 1992 Appl. Phys. Lett. 61 577