Oxygen stoichiometry in PdOx and PdOxPt electrode layers during processing of ferroelectric and high-epsilon perovskites

Journal of Materials Research

Volumn 15, Issue 4, 2000, Pages 961-966

  Saenger, K L ^a   Cabral Jr , C ^a   Duncombe, P R ^a   Grill, A ^a   Neumayer, D A ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRON BEAMS; OXYGEN; PALLADIUM COMPOUNDS; PEROVSKITE; STOICHIOMETRY; THERMOOXIDATION; X RAY DIFFRACTION ANALYSIS;

HIGH-EPSILON PEROVSKITES;

FERROELECTRIC MATERIALS;

EID: 0034174577     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2000.0137     Document Type: Article

References (13)