High current handling capacity multilayer inductors for RF and microwave circuits

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 10, Issue 2, 2000, Pages 139-146

  Bahl, Inder J ^a  

^a GaAsTEK   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; METALLIZING; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; MULTILAYERS; POLYIMIDES; SEMICONDUCTING GALLIUM ARSENIDE;

MULTILAYER INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0034159586     PISSN: 10964290     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-047X(200003)10:2<139::AID-MMCE7>3.0.CO;2-M     Document Type: Article

References (10)

1. M.W. Green, G.J. Green, R.G. Arnold, J.A. Jenkins, and R.H. Jansen, Miniature multilayer spiral inductors for GaAs MMICs, IEEE GaAs IC Symp Dig, 1989, pp. 303-306.
2. M. Engels and R.H. Jansen, Modeling and design of novel passive MMIC components with three and more conductor levels, IEEE MTT-S Int Microwave Symp Dig, 1994, pp. 1293-1296.
3. J.N. Burghartz, K.A. Jenkins, and M. Soyuer, Multilevel-spiral inductors using VLSI interconnect technology, IEEE Electron Device Lett, 17 (Sept. 1996), 428-430.
4. S.W. Paek and K.S. Seo, Air-gap stacked spiral inductor, IEEE Microwave Guided Wave Lett, 7, (Oct. 1997), 329-331.
5. J. Chuang, S. El-Ghazaly, N. El-Zein, V. Nair, G. Maracas, and H. Gronkin, Low loss air-gap spiral inductors for MMICs using glass microbump bonding technique, IEEE MTT-S, Int Microwave Symp Dig, 1998, pp. 131-134.
6. J.N. Burghartz, Spiral inductors or silicon-status and trends, Int J RF Microwave CAE 8 (Nov. 1998), 422-432.
7. I.J. Bahl, E. Griffin, J. Dilley, and M. Balzan, Low loss multilayer microstrip line for monolithic microwave integrated circuits applications, Int J RF Microwave Computer-Aided Eng, 8 (Nov. 1998), 441-454.
8. D. Fisher and I. Bahl, Gallium arsenide IC applications handbook, Academic Press, Boston, 1995, Chap. 1.
9. J.M. Lopez-Villegas, J. Samitier, C. Cane, and P. Losantos, Improvement of the quality factor of RF integrated inductors by layout optimization, IEEE RFIC Symp Dig, 1998, pp. 169-172.
10. I.J. Bahl, Improved quality factor spiral inductors on GaAs substrates, IEEE Microwave Guided Wave Lett (Oct 1999), pp. 398-400.