Air-gap stacked spiral inductor

IEEE Microwave and Guided Wave Letters

Volumn 7, Issue 10, 1997, Pages 329-331

  Paek, Seung Won ^a,b   Seo, Kwang Seok ^a  

^a Seoul National University   (South Korea)

^b LG   (South Korea)

Author keywords

Inductor; MMIC; Semiconductor process

Indexed keywords

CAPACITANCE; INTEGRATED CIRCUIT LAYOUT; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; NATURAL FREQUENCIES; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

AIR GAP STRUCTURES;

ELECTRIC INDUCTORS;

EID: 0031259150     PISSN: 10518207     EISSN: None     Source Type: Journal    
DOI: 10.1109/75.631191     Document Type: Article

References (4)

1. R. A. Pucel, "Design considerations for monolithic microwave circuits," IEEE Trans. Microwave Theory Tech., vol. MTT-29, pp. 513-534, June 1981.
2. J. N. Burghartz, K. A. Jenkins, and M Soyuer, "Multilevel-spiral inductors using VLSI interconnect technology," IEEE Electron Device Lett., vol. 17, pp. 428-430, Sept. 1996.
3. S. Chaki, S. Aono, N. Andoh, Y. Sasaki, N. Tanino, and O. Ishihara, "Experimental study on spiral inductors," in 1995 IEEE MTT-S Dig., 1995, pp. 753-756.
4. H. M. Greenhouse, "Design of planar rectangular microelectronic inductors," IEEE Trans. Parts, Hybids, Packag., vol. PHP-10, no. 2, pp. 101-109, 1974.