Individual tip evaluation in Si field emitter arrays by electrostatic lens projector

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 952-955

  Matsukawa, T ^a   Kanemaru, S ^a   Tokunaga, K ^a   Itoh, J ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ELECTROSTATIC LENSES; OPTICAL PROJECTORS; SEMICONDUCTING SILICON;

FIELD EMITTER ARRAYS;

FIELD EMISSION CATHODES;

EID: 0034156290     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591305     Document Type: Article

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