Simulation of an improved magnetic-electrostatic detector objective lens for LVSEM

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 427, Issue 1-2, 1999, Pages 99-103

  Knell, G ^a   Plies, E ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ELECTRONS; MAGNETIC FIELDS; MAGNETIC LENSES; SCANNING ELECTRON MICROSCOPY;

COMBINED MAGNETIC ELECTROSTATIC LENSES; LOW VOLTAGE SCANNING ELECTRON MICROSCOPY;

ELECTRON OPTICS;

EID: 0345102528     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(98)01548-4     Document Type: Article

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