Development of high-resolution field emission scanning electron microscopy with multifunctions for chargeless observation of nonconducting surface

Scanning

Volumn 19, Issue 7, 1997, Pages 505-511

  Yamamoto, Youiti ^a   Yamada, Mitsuru ^a   Negishi, Tsutomu ^a  

^a JEOL LTD   (Japan)

Author keywords

Angle aperture lens; Field emission scanning electron microscope; Fully digital; No charging observation; Snorkel objective lens

Indexed keywords

ALUMINA; ELECTRONS; LENSES; PHOTORESISTS; SURFACES; ZEOLITES;

ANGLE APERTURE LENS; DIATOMACEOUS EARTH; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; NO CHARGING OBSERVATION; SECONDARY ELECTRONS; SNORKEL OBJECTIVE LENS;

SCANNING ELECTRON MICROSCOPY;

ALUMINUM OXIDE; INFUSORIAL EARTH; ZEOLITE;

ARTICLE; CONDUCTANCE; CYCLOTRON; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; ELECTRODE; ELECTRON BEAM; IMMERSION; LENS POWER; MAGNETIC FIELD; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY;

EID: 0031251826     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950190709     Document Type: Article

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