Effects of interface nonplanarity on the interface fracture energy of the TiN/SiO2 system

Materials Research Society Symposium - Proceedings

Volumn 505, Issue , 1998, Pages 357-362

  Lane, Michael ^a   Ni, Winnie ^a   Dauskardt, Reiner ^a   Ma, Qing ^a   Fujimoto, Harry ^a   Krishna, Nety ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; FRACTURE MECHANICS; INTERFACIAL ENERGY; MATHEMATICAL MODELS; MORPHOLOGY; SILICA; THIN FILMS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

INTERFACE NONPLANARITY;

INTERFACES (MATERIALS);

EID: 0031643231     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)