Characterization of AlxGa1-xN-compound layers by reflectance difference spectroscopy

Physica Status Solidi (A) Applied Research

Volumn 177, Issue 1, 2000, Pages 157-163

  Rossow, U ^a   Aspnes, D E ^b  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; CRYSTAL LATTICES; CRYSTAL SYMMETRY; ENERGY GAP; INTERFACES (MATERIALS); LIGHT REFLECTION; NITRIDES; SAPPHIRE; SEMICONDUCTING ALUMINUM COMPOUNDS; SILICON CARBIDE; SPECTROSCOPY;

ALUMINUM GALLIUM NITRIDE; REFLECTANCE DIFFERENCE SPECTROSCOPY;

SEMICONDUCTING FILMS;

EID: 0033904478     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(200001)177:1<157::AID-PSSA157>3.0.CO;2-P     Document Type: Article

References (17)

1. D. E. ASPNES, J. Vac. Sci. Technol. B 3, 1498 (1985).
2. W. RICHTER, Phil. Trans. Roy. Soc. A344, 453 (1993).
3. D. E. ASPNES, J. P. HARBISON, A. A. STUDNA, L. T. FLOREZ, and M. K. KELLY, J. Vac. Sci. Technol. A 6, 1327 (1988).
4. H. ANGERER, O. AMBACHER, R. DIMITROV, T. METZGER, W. RIEGER, and M. STUTZMANN, MRS Internet J. Nitride Semicond. Res. 1, 15 (1996).
5. T. W. WEEKS, JR., M. D. BREMSER, K. S. AILEY, E. CARLSON, W. G. PERRY, and R. F. DAVIS, Appl. Phys. Lett. 67, 401 (1995).
6. J. F. NYE, Physical Properties of Crystals, Oxford University Press, Oxford 1985 (p. 235 ff).
7. D. E. ASPNES, J. Opt. Soc. Amer. 70, 1275 (1980).
8. M. J. BERGMANN, Ü. ÖZGÜR, H. C. CASEY, JR., H. O. EVERITT, and J. F. MUTH, Appl. Phys. Lett. 75, 67 (1999).
9. R. M. A. AZZAM and N. M. BASHARA, Ellipsometry and Polarized Light, North-Holland, Amsterdam 1977.
10. U. Rossow and W. RICHTER, Spectroscopic Ellipsometry, in: Optical Characterisation of Epitaxial Semiconductor Layers, Eds. G. BAUER and W. RICHTER, Springer-Verlag, Berlin/Heidelberg 1995.
11. U. Rossow, D. E. ASPNES, O. AMBACHER, V. CIMALLA, N. V. EDWARDS, M. BREMSER, R. F. DAVIS, J. A. SCHAEFER, and M. STUTZMANN, phys. stat. sol. (b) 216, 215 (1999).
12. L. ROSKOVCOVA, J. PASTRNAK, and R. BABUSKOVA, phys. stat. sol. 20, K29 (1967).
13. L. ROSKOVCOVA and J. PASTRNAK, phys. stat. sol. 14, K5 (1966).
14. S. NINOMIYA and S. ADACHI, Jpn. J. Appl. Phys. 33, 2479 (1994).
15. S. STEMMER, P. PIROUZ, Y. IKUHARA, and R. F. DAVIS, Phys. Rev. Lett. 77, 1797 (1996).
16. J. TERSOFF, Phys. Rev. Lett. 77, 2017 (1996).
17. B. NEUBAUER, A. ROSENAUER, D. GERTHSEN, O. AMBACHER, and M. STUTZMANN, Appl. Phys. Lett. 73, 930 (1999).