High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum

IEEE Transactions on Electron Devices

Volumn 47, Issue 3, 2000, Pages 553-559

  Correia, José Higino ^a   Bartek, Marian ^a   Wolffenbuttel, Reinoud F ^a  

^a UNIVERSITY OF MINHO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ETALONS; INFRARED RADIATION; INTEGRATED CIRCUIT MANUFACTURE; MICROPROCESSOR CHIPS; OPTICAL FILTERS; SEMICONDUCTING SILICON; THIN FILM DEVICES; ULTRAVIOLET RADIATION;

MICROSPECTROMETERS;

SPECTROMETERS;

EID: 0033900151     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.824727     Document Type: Article

References (19)

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