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Volumn 62, Issue 1, 2000, Pages 109-115
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Microstructure of poly-Si thin films prepared at low temperatures
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL MICROSTRUCTURE;
DISSOLUTION;
ELECTRON DIFFRACTION;
FILM PREPARATION;
HYDROGEN;
NANOSTRUCTURED MATERIALS;
POLYCRYSTALLINE MATERIALS;
SEMICONDUCTING FILMS;
SEMICONDUCTING SILICON;
THIN FILMS;
HOT WIRE CHEMICAL VAPOR DEPOSITION (HWCVD);
SOLAR CELLS;
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EID: 0033890933
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(99)00141-5 Document Type: Article |
Times cited : (18)
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References (16)
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