CMOS-compatible high-temperature micro-heater: Microstructure release and testing

Canadian Journal of Electrical and Computer Engineering

Volumn 25, Issue 1, 2000, Pages 29-33

  Grudin, O ^a   Marinescu, R ^a   Landsberger, L ^a   Cheeke, D ^a   Kahrizi, M ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALCOHOLS; AMMONIUM COMPOUNDS; CMOS INTEGRATED CIRCUITS; ELECTRIC HEATING ELEMENTS; ELECTRIC RESISTANCE; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; MICROSTRUCTURE; SILICON WAFERS; TEMPERATURE CONTROL;

MICROHEATERS;

MICROSENSORS;

EID: 0033888727     PISSN: 08408688     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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