Release-Control Structures for Cantilever-Based Sensors

Sensors and Materials

Volumn 10, Issue 5, 1998, Pages 287-296

  Nikpour, Behrouz ^d   Naseh, Sasan ^d   Landsberger, Leslie M ^a   Kahrizi, Mojtaba ^d   Paranjape, Makarand ^b   Antaki, Robert ^c   Currie, John F ^c  

^a Dept of Electrical and Computer Engineering   (Canada)

^b ITC IRST   (Italy)

^c ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^d NONE

Author keywords

Anisotropic etching; Commercial CMOS; Release control; Stressed oxide cantilever; Use of fast etch planes

Indexed keywords

EID: 0032332164     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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